Nanofabrication Lab (NFL)
The Nanofabrication Lab (NFL) at ICFO is a transversal facility devoted to the fabrication of nanostructured photonic devices.
The 570 m2 facility includes a 275 m2 dedicated ISO6/ISO7 cleanroom area and other controlled environment spaces, hosting a complete set of state-of-the-art nanofabrication tools and techniques for a wide range of optical applications, from biosensing to optical communications, and spanning a broad range of materials, such as polymers, semiconductors, metals or crystals. The laboratory also includes tools for advanced materials and device characterization.
NFL Chair
Prof. Niek van Hulst
NFL Scientific Officer
Dr. Johann Osmond
Facility Staff
Francisco Javier Pérez Díaz
Paula Díaz Carreras
Available techniques
Lithography
• E-beam lithography (EBL)
• Optical lithography (Maskless aligner)
Imaging
• Scanning Electron Microscopy (SEM)
Surface activation and cleaning
• Plasma ashing/cleaning
• Ozone cleaning
Surface topography
• Atomic Force Microscopy (AFM)
• Profilometry
Nanomachining and nanoanalytics
• Focused Ion Beam (FIB)
Analysis and metrology
• Spectroscopic ellipsometry
Thin film deposition
• Thermal and e-beam evaporation
• Sputtering
• Thermal and plasma-assisted Atomic Layer Deposition (ALD)
Dry etching
• Reactive Ion Etching (RIE)
Equipment
Lesker LAB18
Oxford Instruments Plasmalab System 100 ICP 180
Heidelberg Maskless Aligner MLA150
Zeiss Auriga CrossBeam
Current Fees