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Optical spectroscopy

Ellipsometer UV/VIS/NIR J.A. Woollam RC2

The J.A. Woollam RC2 is a spectroscopic ellipsometer that combines dual rotating compensators with a wide spectral range to measure film thickness, optical constants (n & k) and anisotropy with very high precision.

Configuration

Dual Rotating Compensator

 

Wavelength range

210nm to 1000nm (790 wavelengths) completed by NIR extension 1005nm to 2500nm (250 wavelengths)

Spectral resolution

1nm wavelength spacing, < 2. 5nm FWHM for 210 nm – 1000 nm range and 6 nm wavelength spacing, < 15 nm FWHM for 1005 nm – 2500 nm range

Ellipsometer IR J.A. Woollam IR-VASE

The J.A. Woollam IR-VASE is a spectroscopic ellipsometer optimized for the infrared range, used to characterize optical constants, phonon modes, free-carrier absorption, and film thickness in semiconductors, polymers, and other IR-active materials.

Configuration

Step-scan rotating compensator

 

Maximum sample size

200mm diameter, 25mm diameter.

Spectral range

1.7μm to 30μm (333 cm-1 to 5900 cm-1)

Spectral resolution

1, 2, 4, 8, 16, 32, or 64 cm-1

Fourier Transform Infrared Spectrometer Bruker VERTEX 80v + verTera on Hyperion II microscope

​The Bruker Hyperion II is a FTIR microscope that enables infrared spectroscopic imaging and microspectroscopy with high spatial resolution, useful for chemical mapping, defect analysis, and material characterization. The verTera extension allows to reach THz spectral range.

Spectral range

from 3 cm-1 to 20,000 cm-1

 

Spectral resolution

0.2 cm-1 except for the THz region

Detectors

Si diode detector, TE-cooled InGaAs detector, LN-cooled MCT detector, DLaTGS detector

Temperature control stage

from -196ºC to 300ºC

Raman microscope Renishaw inVia

The Renishaw inVia is a confocal Raman microscope used for chemical, structural, and stress analysis with micron spatial resolution.

Spectral resolution

0.5 cm-1 (FWHM)

 

Raman spectral range

100 cm-1 to 4000 cm-1

Spectrometer range

200 nm – 2000 nm

Lasers available

wavelengths of 532 nm, 633 nm, 785 nm

Microscope objectives

5x, 20x, 50x, 100x, 63x immersion

Micro-spectrophotometer Technospex uSight-2100

​The Technospex uSight-2100 is micro-spectroscopy system that measures transmittance, absorption, reflectance of samples at micron sampling area

Wavelength range and resolution

200 nm – 1100 nm (Linear Array Detector), 900 nm – 1700 nm (uncooled InGaAs)

Spectral resolution

2nm at 200 nm -1100 nm range, 6 nm at 900 nm – 1700 nm range

 

Spot size

down to ~1um (100x objective lens)

Stage

75mm x 50mm motorized with 0.1 um step size

Microscope objectives

20x, 50x, 100x

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